Source Flange

The SVTA-MBE design team is equipped to build custom ultrahigh vacuum source flanges of virtually any specifications to meet your thin film system needs. Source flanges are an excellent way to add MBE deposition source capability to UHV chambers.

SVTA offers sizes that range from four-2.75 effusion cell ports on a 10" flange, to eight- 4.625" effusion cell ports on a 22" flange. The source flange includes a center viewing port for pyrometry and can be ordered with or without integral shutter assemblies. Each source flange is designed with attached cryopanel and large LN2 feedthrough.

Technical Documentation:

• Source Flange Specification Sheet

Contact SVTA for more information.