THIN FILM METROLOGY

Partnership with and

The Measurement of:

Thickness Refractive Index Absorption Index Composition Roughness Non-uniformity (gradient) anisotropy Of Single film and layer stacks using Optical Methods

Reflectometry

Measurement of Film Thickness
Measurement of Refractive Index
Measurement of Absorption Index

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Laser Ellipsometer

Measurement of Film Thickness
Measurement of Refractive Index
Measurement of Absorption Index

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Spectroscopic Ellipsometer

Measurement of the dispersion of the Refractive Index
Measurement of absorbing films
Measurement of Composition
Measurement of Material Gradients
Measurement of Layer Stacks
Measurement of Anisotropic Materials
Infrared Spectroscopic Ellipsometry

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