MBE Systems

Molecular Beam Epitaxy (MBE) is a key technology in enabling research and manufacturing of technology for semiconductor materials and devices. Due to ever increasing demand of communication bandwidth and chip density, device fabrication relies on the exact dimensional and quality controls that MBE provides. SVTA MBE systems offer an ultra-pure environment for precision fabrication of a wide variety of thin film structures for microelectronic, opto-electronic, and magnetic applications. SVTA MBE Systems are specially designed for the materials they produce. The MBE Systems are equipped with hardware and software capabilities to monitor, display, and control critical growth parameters.

SVTA Systems are designed around a modular configuration consisting of several functional units. The modular system concept is a flexible and reliable way of adapting to different customer needs. Typically, there are at least two separate modules, one for the deposition process and one for wafer loading/sample preparation. There are other processing modules, such as cluster tool, wafer cleaving tool and material analysis modules that may be added depending on the customer needs. Each module has its own independent UHV pumping system and can be isolated from other modules by gate valves. This arrangement makes it possible to perform various system functions independently and concurrently: substrate loading, sample treatment, film growth, and sample analysis.

SVTA Systems:

• ALD Systems
• PLD Systems
• Nitride Systems
• Oxide Systems
• Silicon Systems
• Metal Organic Systems
• Generic III-V and II-VI Systems
• System Components
• Dual Chamber MBE System (pdf brochure)

Contact SVTA for more information.