Sample Manipulator
SVTA
offers a comprehensive line of sample manipulators for MBE and MOCVD
systems. SVTA's sample manipulator is equipped with XY stage and
Z manipulation to aid in substrate positioning and sample transfer.
Each substrate heater module and holder is carefully designed for
the intended growth environment. Motorized substrate rotation and
temperature feedback controller are available for best heating and
growth uniformity. Substrate sizes from 1" - 8" wafers
are available.
Technical Documentation:
Contact SVTA for more information.
|