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Source Shutters

Source ShuttersSVTA source shutters are designed for quick motion and long life. The source shutter assembly consists of an in-vacuum component, an external component and a shutter blade. The vacuum part of the shutter is magnetically coupled to the external part. This unique feature extends the service life of the SVTA-SM shutter over a bellow style type. Models are available in 3 or 4 inch stroke lengths and mounts on a 4.5" or 6.0" CF flange. The shutter blades are made of either Molybdenum or Tantalum composition. Other materials are available on request. SVTA also offers a full computer controllable shutter package that includes a 19" rack mountable control unit (SC200M).

As an option, SVTA also offers integral shutters (SVTA-IS) for your deposition sources. They can be either pneumatically or manually actuated.

Features:

  • Simple and Fast Removal for Blade Cleaning/Replacing
  • Highly Dependable
  • Increased Lifetime Cycles
  • Shutter Motion Minimizes Mechanical Shock

Contact SVTA for more information.
 
 
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SVT Associates, Inc., 7620 Executive Drive, Eden Prairie, MN 55344 USA
Phone: 952-934-2100
Fax: 952-934-2737
Email: sales@svta.com