In-Situ Cathodoluminescence

The SVTA In-Situ CL System is based on electron excitation of the growing thin film utilizing the existing RHEED electron beam. The stimulated light is collected and spectrally analyzed using only a single 2.75" CCF viewport. The collection optics is mounted on a retractable bellows to avoid coating of the lens assembly during growth.

Valuable information of the semiconductor band gap allows quantitative determination of material composition and optical quality. By adjusting the electron energy depth profiles can be accessed. Qualitative information of doping levels can be extracted from the spectra. The In-Situ CL technique provides essential information of thin films growth processes when RHEED diffraction pattern cannot be observed.

Applications:

• MBE Growth of Nitrides (GaN,...)
• MBE Growth of Oxides (High-k materials,...)

Technical Documentation:

• Application Note 1101 (In-Situ Cathodoluminescence)
• In-Situ CL Product Data Sheet

Contact SVTA for more information.