In-Situ Cathodoluminescence
The
SVTA In-Situ CL System is based on electron excitation of the growing thin film
utilizing the existing RHEED electron beam. The stimulated light is collected
and spectrally analyzed using only a single 2.75" CCF viewport. The collection
optics is mounted on a retractable bellows to avoid coating of the lens assembly
during growth.
Valuable information of the semiconductor band gap allows quantitative determination
of material composition and optical quality. By adjusting the electron energy
depth profiles can be accessed. Qualitative information of doping levels can be
extracted from the spectra. The In-Situ CL technique provides essential information
of thin films growth processes when RHEED diffraction pattern cannot be observed.
Applications:
- MBE Growth of Nitrides (GaN,...)
- MBE Growth of Oxides (High-k materials,...)
Technical Documentation:
Contact SVTA for more information. |