AccuFlux Process Controller

SVT Associates has developed the unique AccuFlux Process Controller for real-time measurement and monitoring of atomic fluxes in a thin film deposition process. Based on Atomic Absorption Spectroscopy the system measures the atomic vapor flux density originating from solid and gas sources. A proprietary optical design and absolute material selectivity ensure multi-flux measurements with high accuracy for excellent composition control better than 0.3%.

The compact unit provides closed loop control for high process repeatability. A windows based software module allows monitoring, documentation and interfacing to process control equipment.

Applications:

• MBE Growth (III/V, II/VI,)
• Sputter Deposition (High T_c Superconductors, Dielectrics, Optical Coatings)
• Nitriding and Nitrogen Doping
• Oxidation and Oxygen Doping

Technical Documentation:

• AccuFlux Product Data Sheet

Contact SVTA for more information.