RHEED

The SVT Associates RHEED (Reflection High Energy Electron Diffraction) System is a fully UHV compatible instrument for diffraction studies and growth monitoring in a wide variety of MBE and UHV applications. The RHEED Gun mounts on a 4.5" CF flange and provides electron beams of small spot size and energies up to 10keV. Robust filaments and magnetically shielded electron optics ensure reliable and uncomplicated operation. The RHEED Power Supply produces all necessary beam and objective voltages, emission current, filament current as well as X and Y deflection voltages in a compact enclosure. RHEED Screens are available for 6" CFF and 8" CFF viewports.

The RHEED Image Analysis Package combines a highly sensitive CCD camera based image acquisition system with a powerful image analysis software package. It provides the necessary tools to gain insight into thin film growth processes and to optimize material quality. The image analysis package provides view-graphs for lattice spacing, strain evolution, growth rate and thickness, as well as reconstruction evolution. All image data can be stored as movie and clipart files for documentation and ex-situ analysis.

Applications:

• Semiconductor Growth (III-V, II-VI, ...)
• Superconductors (YBCO, BSCCO, TBCCO, ...)

Technical Documentation:

• 10 keV RHEED System
• RHEED Image Analysis
• RHEED Optional Components

Contact SVTA for more information.