Spectroscopic Ellipsometers

	Spectroscopic Ellipsometer SENDURO^® The total time to analyze a sample will take no longer than maybe ten seconds! This time includes all necessary steps; i.e.: placing the sample on the sample slide, starting the measurement procedure by pushing a button to proceed the steps: automatic alignment, actual measurement, calculation, displaying the results Removing the sample. The SENDURO^® liberates the user from manual sample alignment in height and tilt required for precise and repeatable ellipsometric measurements. The patented automatic alignment device strongly reduces operation failures, works for transparent and reflective samples and makes automatic maps possible even on bent wafers.
	Spectroscopic Ellipsometer SE 800 *Spectral range: 350 nm- 850 nm* *Optional: 280 nm- 850 nm* The spectroscopic ellipsometer SE 800 is a high performance fast diode array detector based spectroscopic ellipsometer in the UV/VIS spectral range featuring both fast data acquisition and full spectral resolution. The spectroscopic ellipsometer SE 800 is tailored for high demanding applications like the measurement of thin transparent films on glass, light emitting and semiconducting polymers, multiple layer stacks on absorbing and transparent substrates, AR coatings on window pane and advanced microelectronic applications like SOI, high-k and low-k materials. Anisotropic and non-uniform samples can be analyzed.
	Large Area Ellipsometer SE 400-300, SE 500-300, SE 800-3 The SE X00-300 is a large area ellipsometer with fixed angle of incidence and outstanding features such as very high repeatability of layer thickness and refractive index, auto focus (optional), large number of predefined applications, and material library which makes the instrument suitable for small scale productions. The ellipsometer platform allows the extension of the metrology tool for even larger substrates. The ellipsometer can be a discrete wavelength ellipsometer SE 400-300 or a spectroscopic ellipsometer SE 800-300. The SE 500-300 comprises the SE 400-300 and the Film Thickness Probe FTPadvanced installed together with the auto collimating telescope
	Spectroscopic Ellipsometer SE 805 Spectral range: 700 nm - 1700 nm The SE 805 is a near infrared spectroscopic ellipsometer. It is a high performance spectroscopic ellipsometer based on fast interferometric modulated detection in the NIR spectral range. The SE 805 is based on the Step Scan Analyzer operation principle. The modulated light intensity is measured at fixed analyzer positions using a broad band solid state detector.
	Spectroscopic Ellipsometer SE 850 *Spectral range: 350 nm - 1700 nm* The SE 850 is SENTECH's UV-VIS-NIR spectroscopic ellipsometer. It is a high performance spectroscopic ellipsometer based on fast diode array detection in the UV-VIS spectral range and interferometric modulated detection in the NIR spectral range, featuring both fast data acquisition and full spectral resolution. Applying FT-IR spectroscopy not only adds speed, high resolution, high signal to noise ratio, but provides automatic wavelength calibration as well.
	Deep UV-VIS spectroscopic ellipsometer SE 800DUV *Spectral range: 190 nm- 950 nm* The SE 800 DUV is tailored for high demanding applications like the measurement of thin transparent films on glass, photo resist materials and AR coatings for innovative lithography applications, multiple layer stacks on absorbing and transparent substrates, and advanced microelectronic applications like SOI, ONOPO and high-k materials. Anisotropic and non-uniform samples can be analyzed. The SE 800 DUV is a high performance fast diode array detector based spectroscopic ellipsometer in the UV/VIS/NIR spectral range featuring fast data acquisition, full spectral resolution, high precision CombiRetarder, and computer controlled polarizer angle. The SE 800 DUV is based on the Step Scan Analyzer operation principle. The reflected light is analyzed at fixed analyzer positions using a mulichannel analyzer, consisting of a grating and a photodiode array.
	FT-IR MIR spectroscopic ellipsometer SE 900-50 In the infrared spectral range spectroscopic ellipsometry is applied to gain information of the vibrational and electrical properties of layers and materials. SENTECH Instruments has developed an infrared ellipsometer as accessory to FT-IR spectrometers. The SE 900 Infrared Ellipsometer upgrades commercial FT-IR spectrometers to high performance spectroscopic ellipsometers in the infrared spectral range. The ellipsometer is preferably used with BIO-RAD MIR FT-IR spectrometers. The ellipsometer and the FT-IR spectrometer are both operated by SPECTRARAY II.
	Spectroscopic ellipsometer software SPECTRARAY II The SPECTRARAY II software provides a user friendly interface to operate SENTECH's spectroscopic ellipsometers and a comprehensive set of tools to manipulate ellipsometric data. Easy operation is introduced by adding the new wizard which guides the user through the typical sequence of measuring, fitting and reporting. The wizard hides the complexity of setting up the measurements and fits.
	In situ spectroscopic ellipsometer SE 801 The SE 801 is a high performance fast diode array detector based spectroscopic ellipsometer in the UV/VIS spectral range featuring both fast data acquisition and full spectral resolution. The minimal data acquisition time is 100 ms for 1024 wavelength points. The SE 801 process ellipsometer allows to monitor kinetic processes as growth and etch processes of complex sample structures in different ambient.