SVT Associates Systems Software Effusion Cells RF Plasma Sources In-Situ Process Control Instruments Wafers & UV Detectors
About SVT Associates      View STV Associates Products       Contact SVT Associates       Search SVTA Web Site       Site Map       SVT Associates Home Page
Systems
Deposition Sources
Electronics
Thin Film Process Monitoring
Epitaxial Wafers
UV Detectors

Plasma Processing Technology
Ellipsometers

Effusion Cell Accessories

Optional Features:

Water Cooling
Integral water cooling is available as an option on many SVTA effusion cells. Water cooling shrouds require a 4.50" CFF or larger flange size.

Rotary Shutters
SVTA effusion cells are available with integral rotary shutter to enhance compatibility with existing MBE systems. Integral shutters requires a 4.50" CFF or larger flange size.

Power Supply and Temperature Controller

Effusion Cells Power Supply* Temperature Controller
SVTA-SF 1 kW or 600 W PID, Type C
SVTA-HL 1 kW or 600 W PID, Type C
SVTA-CL 1 kW or 600 W PID, Type C
SVTA-LT 1 kW or 600 W PID, Type K
SVTA-HT 1 kW PID, Type C
SVTA-D 1 kW or 600 W PID, Type C
SVTA-DF 1 kW or 600 W PID, Type C
SVTA-EXCEL 1 kW or 600 W PID, Type K
*Contact SVTA for your power requirement.

Crucible Size* Model
SVTA-5CC 5cc, PBN D
SVTA-10CC 10cc, PBN HT
SVTA-10CC-PG 10cc, Pyrolytic Graphite HT
SVTA-10CC-W 10cc, Tungsten HT
SVTA-10CC-BeO 10cc, BeO HT
SVTA-16CC 16cc, PBN D, SF, HL, CL, LT, DF, EXCEL
SVTA-20CC 20cc, PBN SF, HL, CL, LT, DF, EXCEL
SVTA-22CC 22cc, PBN SF, HL, CL, LT, DF, EXCEL
SVTA-40CC 40cc, PBN SF, HL, CL, LT, DF, EXCEL
SVTA-50CC 50cc, PBN HL, CL
SVTA-60CC 60cc, PBN SF, HL, CL, DF, EXCEL
SVTA-85CC 85cc, PBN SF, HL, CL, DF
SVTA-150CC 150cc, PBN D, EXCEL
*Contact SVTA for further assistance in selecting the best crucible size for your system.

Contact SVTA for more information.

 
 
Copyright © 2010 SVT ASSOCIATES, INC. All rights reserved.
SVT Associates, Inc., 7620 Executive Drive, Eden Prairie, MN 55344 USA
Phone: 952-934-2100
Fax: 952-934-2737
Email: sales@svta.com