Generic III-V or II-VI Systems

The SVTA-MBE35 system has been specifically designed to grow high quality III-V or II-VI compound semiconductor materials. The modular system concept is a flexible and reliable way of adapting to different customer needs. The base system consists of two modules: Epitaxy Growth Module and Load Lock/Buffer/Preparation Module. Each module has its own independent UHV pumping system and can be isolated from each other by a gate valve. The system can be configured combining the use of solid and gas sources for deposition. The flexibility of the system configuration ensures that the system can be used for a wide variety of application and development purposes. It comes standard in either a linear or right angle configuration.

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