Metal Organic Systems

The SVTA MOMBE system has been specifically developed to satisfy the requirement of high quality growth of materials using gaseous metal organic compounds. The base system consists of three modules: Epitaxy Growth Module, Load Lock /Buffer/Preparation Module and Gas Handling Module. The advanced gas handling module provides precision control of high purity gas into the system. A proprietary pressure control algorithm is used to minimize gas transients during growth. Gas line manifolds, gas line exhaust, purge and scrubbing facilities are enclosed within a safety gas cabinet for easy access and maintenance. The system comes standard in either a linear or right angle configuration.

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