PLD Systems

The pulsed laser deposition module is capable of holding six targets for evaporation of thin film materials. The targets are held on a carousel and can be manually indexed external to the vacuum. A detent locks the carousel in place every sixty degrees to ensure proper target alignment. The PLD module is fully UHV compatible with metal seals and bellows sealed feedthroughs.

Features
— Metals, Oxides, Multi-element Compounds
— 6 Rotatable Targets
— High Power Laser
— Flexible Pumping Combination
— Versatile Module Configuration
— Optional Sample Load Lock
— Training and Full Service Support
— RoboMBE^TM Process Automation

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