Silicon Systems

The SVTA Silicon MBE system has been specifically designed to satisfy the requirement of high quality growth of IV-IV materials and related Silicon semiconductor compounds. It is equipped with electron beam evaporation sources, effusion cells and combines electronic sensor feedback to achieve highly reproducible thin films. The flexibility of the system configuration ensures utilization of the system for a wide variety of application and development purposes. The base system consists of two modules: Epitaxy Growth Module and Load Lock/Buffer/Preparation Module. The system comes standard in either a linear or right angle configuration.

Contact SVTA for more information.