Electron
Evaporation Source Controller
Electron
Evaporation Source Controller SVTA-EBS-5 is an advanced electronic package using
feedback control of the power supply to monitor the e-beam current level through
the excitation filament power supply. The power supply for the SVTA compact E-beam
Source consists of three
modules:
- A high voltage supply (3kV @100ma) provides the source rod bias.
- A high current supply (20V @50A) provides filament power.
- A controller is connected to the other two supplies and sets as well as maintains
the output emission current. It also provides flux monitor bias while measuring
and displaying flux monitor current.
SVT Associates is capable of designing the perfect electron
beam evaporation system for depositing IV-IV materials and metals. The evaporation
sources are offered as a complete turn-key, flange-mounted system with all the
necessary connections, including fluid and electrical feedthroughs. SVTA's evaporation
sources are powered and controlled with advanced solid state switching power supplies,
beam sweepers and control electronics.
Contact SVTA for more
information. |