Gas Injectors

SVT Associates gas injectors are designed for gas source thin film systems. The gas injectors operate on the principle of gas cracking using a single filament gas tube furnace. These sources have very high dissociation efficiency even at low power levels due to careful design of the heating zone. A cooling shroud minimizes heat load into the system environment for ultra-low contamination levels.

Single and multiple gas injector sources are available for greater flexibility. The source can be equipped with a pressure based gas handling system for safe and accurate gas delivery.

Applications:

• Etching (H, Cl, CBr₄...)
• Oxidation, Nitridation and Oxynitrides (NH₃, O₂...)
• GSMBE (AsH₃, PH₃...)
• MOMBE (TMA, TMG....)

Technical Documentation:

• NH₃ Gas Injectors for Nitrides
• Ozone Gas Delivery System
• CBr₄ Gas Injector

Contact SVTA for more information.