Gas Handling System

SVT Associates' Advanced Gas Handling delivery module provides precision control of high purity gas flows into thin film systems. A proprietary pressure control algorithm is used to accomplish this task and to minimize gas transients during growth. Gas line modules, gas line exhaust, purge and scrubbing facilities are enclosed within one safety gas cabinet for easy access and maintenance. Combining the advantages of an ultra-high purity gas panel and high temperature gas injectors, SVTA gas source delivery module is intended for use in III-V MBE applications.

SVTA's Gas Source system consists of the following components:

• Gas Cabinet & Panels
• Gas Injectors (AsH3, PH3, NH3...)

Features:

• RoboMBE™ Process Automation Control
• Design for High Reliability
• Electropolished (<10 Ra) Stainless Steel Gas Components
• Run-Vent Control Optional

Contact SVTA for more information.