Nitride Systems

For over 10 years SVTA's Application Laboratory has been recognized as a world leader in the growth of III-Nitride materials. SVTA Nitride MBE Systems have been specifically designed to grow high quality GaN, AlN and related Nitride materials. The growth module is designed to handle harsh active nitrogen content and is equipped with a high temperature substrate heater for uniform growth. The nitrogen species are generated by either a RF Plasma or Ammonia Source. The base system consists of two modules: Epitaxy Growth Module and Load Lock/Buffer/Preparation Module. The system comes standard in either a linear or right angle configuration.

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