Oxide Systems

The SVTA Oxide MBE system has been specifically developed to grow high quality superconducting films and metal oxide materials. The growth module is designed to handle harsh active oxygen content and is equipped with an oxygen resistant substrate heater. The oxygen species are generated by either a RF Plasma or Ozone Delivery Source. The base system consists of two modules: Epitaxy Growth Module and Load Lock/Buffer/Preparation Module. The system comes standard in either a linear or right angle configuration.

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